【发明专利】 DYNAMIC OR QUASI-DYNAMIC FORCE DETECTION APPARATUS AND METHOD
【发明专利】 SYSTEM FOR MEASURING CURVED SURFACE OF TRANSPARENT OR TRANSLUCENT MATERIAL
【发明专利】 METHOD FOR MEASURING THE THICKNESS OR CURVATURE OF THIN FILMS
【发明专利】 Method for measuring the thickness or curvature of thin films
【发明专利】 SENSOR WITH COMPOSITE DIAPHRAGM CONTAINING CARBON NANOTUBES OR SEMICONDUCTING NANOWIRES
【发明专利】 METHOD OF MEASURING HARDNESS OR ELASTIC MODULUS OF THIN FILM
PROBLEM TO BE SOLVED: To provide a method of measuring a hardness and an elastic modulus of a thin film capable of measuring accurately the hardness and the elastic modulus of the thin film such as a carbon rigid film formed on a surface of a base material by a CVD method or a PVD method.
SOLUTION: When an indenter is pushed into the thin film formed on the surface of the base material to measure the hardness and the elastic modulus of the thin film based on a pushed-in depth therein, the hardness and the elastic modulus of the thin film is measured while the pushed-in depth of the indenter is specified within a range of 2-50% with respect to a film thickness of the thin film.
COPYRIGHT: (C)2006,JPO&NCIPI
【发明专利】 Improvements in or relating to Pulse Analysing and Counting Arrangements
【发明专利】 Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires