基本信息

• 发明名称： 【发明专利】 METHOD OF MEASURING HARDNESS OR ELASTIC MODULUS OF THIN FILM
• 申请日： 1970-08-21
• 申请号/专利号： JP2004146900
• 专利权人： KONNO MASARU;SAITO TAKESHI
• 申请人： NSK LTD
• 分类号：
• 发明人/设计人： KONNO MASARU;SAITO TAKESHI
• 公开日/公告日： 1970.08.21
• 优先权号：
• 代理机构：
• 代理人：
• PCT申请号： 无
• PCT申请日期： 无
• PCT进入国家阶段日： 无
• 生物宝藏信息： 无
• 审查员： 无

摘要：

PROBLEM TO BE SOLVED: To provide a method of measuring a hardness and an elastic modulus of a thin film capable of measuring accurately the hardness and the elastic modulus of the thin film such as a carbon rigid film formed on a surface of a base material by a CVD method or a PVD method.

SOLUTION: When an indenter is pushed into the thin film formed on the surface of the base material to measure the hardness and the elastic modulus of the thin film based on a pushed-in depth therein, the hardness and the elastic modulus of the thin film is measured while the pushed-in depth of the indenter is specified within a range of 2-50% with respect to a film thickness of the thin film.

COPYRIGHT: (C)2006,JPO&NCIPI

摘要附图：