【发明专利】 Method for Measuring the Thickness or Curvature of Thin Films
【发明专利】 Device for the rapid separation and/or conversion of substrates
【发明专利】 METHOD FOR MEASURING THE THICKNESS OR CURVATURE OF THIN FILMS
【发明专利】 METHOD FOR PREPARING SPECIMEN FOR ANALYSIS OR OBSERVATION OF SKIN
【发明专利】 METHOD OF MEASURING HARDNESS OR ELASTIC MODULUS OF THIN FILM
PROBLEM TO BE SOLVED: To provide a method of measuring a hardness and an elastic modulus of a thin film capable of measuring accurately the hardness and the elastic modulus of the thin film such as a carbon rigid film formed on a surface of a base material by a CVD method or a PVD method.
SOLUTION: When an indenter is pushed into the thin film formed on the surface of the base material to measure the hardness and the elastic modulus of the thin film based on a pushed-in depth therein, the hardness and the elastic modulus of the thin film is measured while the pushed-in depth of the indenter is specified within a range of 2-50% with respect to a film thickness of the thin film.
COPYRIGHT: (C)2006,JPO&NCIPI
【发明专利】 DYNAMIC OR QUASI-DYNAMIC FORCE DETECTION APPARATUS AND METHOD
【发明专利】 STABILIZED OR PARTIALLY STABILIZED ZIRCONIA THIN FILM AND ITS PRODUCTION
【发明专利】 SYSTEM AND METHOD FOR TRAINING OR TESTING STATE MONITORING MODULE