基本信息
摘要：The invention concerns a method for testing or measuring electrical elements, wherein a beam (6) of particles is applied to a location of an electrical element (2, 3), charges are released under the effect of the application of the beam (6) of particles, the released charges are collected by a collector (9), the amount of collected charges is measured, and an electrical characteristic is derived from the measurement of the amount of charges collected. The invention is applicable, in particular, to measuring the resistance and/or the capacity of printed circuits, as well as to any other type of substrates such flat displays, circuits equipped with components, semi-conductor chips.
摘要附图：
