基本信息
摘要:
PROBLEM TO BE SOLVED: To provide a two-dimensional detector for light or radiation in which influence of static electricity can be suppressed.
SOLUTION: A conductive plate 21 is stacked on the surface of an insulating film 7 for sealing an applying electrode 3 on the incident side of radiation or light and grounded. With such an arrangement, static electricity being generated in the range facing the applying electrode 3 can be discharged on the incident side surface of the insulating film 7. Discharge of static electricity is thereby prevented and superposition of noise onto charge information being converted from radiation or light by a semiconductor thick film 1 can be suppressed. Consequently, influence of static electricity is suppressed and an active matrix substrate 5 can read out charge information.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要附图: