基本信息
摘要：A microsensor system for determining water vapor content of the ambient atmosphere that uses a thin film suspended ceramic diaphragm structure featuring an embedded, patterned thin film heater, temperature sensor and an external film of an hygroscopic salt stabilized in a water-insoluble, crosslinked polymer matrix and contacting a pair of patterned electrodes which are proximate to the heater. The heater controls a selected electrical parameter of the salt to a fixed, predetermined value, as determined by its electrical characteristics. The dew point of the atmosphere is determined based on the dynamic relation with the salt dehydration temperature.
摘要附图：
