基本信息
摘要:981,447. Electron microscopes; electrostatic holding devices. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. Aug. 26, 1963 [Aug. 29, 1962], No. 33693/63. Headings H1D and H1P. An electron microscope is provided with an object stage in the form of a heat apertured disc 6 within an opening in which the object 8 is arranged and by means of which the object is movable in any lateral direction, together with at least one body 19 of semi-conductor material connected to the object stage 6 and arranged to contact a stationary part 11 of the microscope, the arrangement being such that, when a voltage is set up between the stationary part 11 and a conductive layer 22 on that surface of the body 19 remote from the part 11, electrostatic forces between the body 19 and the part 11 clamp the object stage 6 in such a manner as to prevent axial movement thereof. Suitable semi-conductor materials are slate, marble, agate and certain ceramic synthetic materials having a resistivity of approximately 10
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