基本信息
摘要:PROBLEM TO BE SOLVED: To grasp each phenomenon by providing a phenomenon detection part to detect the physical phenomenon and/or chemical phenomenon to fetch the electric signal of a plurality of physical phenomena and/or chemical phenomena on one side of a semi-conductor substrate in an approximately simultaneous manner. SOLUTION: A phenomenon detection device body 1 is installed in the solution, and a reference electrode 16 is immersed in the solution to determine its electric potential. A silicon substrate 2 is grounded, and a depletion layer 23 dependent on the voltage to be applied to the electrode 16 and the pH concentration of the solution is expanded below a sensing part 7 of the substrate 2. When the light is made incident on an upper surface of the silicon substrate 2 and the light enters the depletion layer 23, a pair of electron and hole are generated, the hole is discharged out of the substrate 2 while the electron is accumulated in the depletion layer 23. Before the electrons accumulated in the depletion layer 23 flows into a diffusion area 4, the positive voltage is applied to a set gate 9, and fixed to the initial electric potential, and the positive voltage is applied to a read electrode 8 to change the electric potential of the area 4, and the intensity of the light can be detected by reading the electric potential by a source follower circuit 10.
摘要附图: