基本信息
摘要：PURPOSE:To obtain high insulation property without spoiling heat conductivity and to take an accurate measurement even when the body to be measured is energized by coating the tip part of a contactor with a thin film of diamond. CONSTITUTION:The contactor 1 consists of a protective pipe 4 which projects to a probe 3 and a sensor 5 such as a thermocouple stored in the pipe. Then the diamond thin-film coating layer 2 is formed at the tip part of the sensor 5 which faces the tip of the protective pipe 4, the outer peripheral surface nearby it, and the opening end of the protective pipe 4. When the tip of the sensor 5 projects from the pipe 4, the coating layer 2 is formed only at the tip. The coating layer 2 is formed by a plasma CVD method, etc., and when the voltage of the body to be measured is 200V, thickness of about 10mum is enough. This thickness is made preferably as thin as possible so as to reduce the difference from the part to be measured. The inherent resistance of the diamond thin film 2 is 10<16>OMEGAcm, so the electric insulation is sufficiently high and the heat conductivity is about 5 times as large as that of copper and sufficiently large.
摘要附图：
