基本信息
摘要：A pore- or particle-size distribution measurement apparatus capable of measuring the size of a pore or a particle in a short time with high accuracy, is provided. When the size of a pore (Y) existing in a porous insulator film ( 3 ) or the size of a particle in a thin film is measured, a specimen ( 5 ) having the insulator film ( 3 ) formed on the surface of a substrate ( 4 ) is irradiated, from the surface side thereof, with X-rays R at a specified incident angle thetai larger than the total reflection critical angle of the insulator film ( 3 ) but not exceeding 1.3 times the total reflection critical angle of the substrate ( 4 ). In the irradiated X-rays, among components exiting from the insulator film ( 3 ) without entering the pore (Y) and scattering of reflection component of the X-rays reflected on the surface of the substrate ( 4 ) after having entered the insulator film ( 3 ), the scattered component whose exit angle is larger than that of a component of the reflection component which exits from the insulator film ( 3 ) without entering the pore (Y) is detected.
摘要附图：
