基本信息
摘要：A device and a process for the calibration of a semi-conductor component test system The invention relates to a process and a device for the calibration of a probe card and/or of a semi-conductor component test apparatus, including a first connection, at which a corresponding signal, in particular a calibration signal can be applied, and a second connection, connected or connectable with the first connection, at which the signal, in particular the calibration signal, can be emitted, and a third connection, at which a corresponding further signal, in particular a calibration signal, can be applied, and a fourth connection, connected or connectable with the third connection, at which the further signal, in particular the calibration signal, can be emitted.
摘要附图：
