基本信息

• 发明名称： 【发明专利】 Resistance thermometer with stable linear characteristic to high temp. - has insulating substrate with rhodium or iridium thin film resistor
• 申请日： 1970-08-18
• 申请号/专利号： DE2941995
• 专利权人： DIEHL WALTER DIPL PHYS DR;KOEHLER WOLFGANG DR
• 申请人： DEGUSSA
• 分类号： H01C7/02
• 发明人/设计人： DIEHL WALTER DIPL PHYS DR;KOEHLER WOLFGANG DR
• 公开日/公告日： 1970.08.18
• 优先权号： H01C7/02
• 代理机构：
• 代理人：
• PCT申请号： 无
• PCT申请日期： 无
• PCT进入国家阶段日： 无
• 生物宝藏信息： 无
• 审查员： 无

摘要：Resistance thermometer with linear characteristic consists of an electrically insulating substrate with a metal thin film resistor, consisting of Rh or Ir. Pref. Rh or Ir films are applied by cathodic sputtering with Kr and/or Xe or a gas mixt. contg. min. 50 vol.% Kr and/or Xe as operating gas and a bias is applied to the substrate during the deposition process. The metal films are then tempered in an inert atmos. Thermometer has a stable linear characteristics up to 500 deg.C and has a high temp. coefft. of resistance similar to that of the Pt resistance thermometer.

摘要附图：