基本信息
摘要：PURPOSE:To measure the optical constant of a thin film with high accuracy by calculating the optical constant of a medium formed by bringing a prism integrated with a photodetector into tight contact with a medium and using the medium formed by feeding back the measured value to a process for forming the medium to execute control. CONSTITUTION:The ray propagating in an optical wave guide 2 attains a discrete value with the incident angle of a light beam. The effective refractive index of the medium is, therefore, determined by continuously measuring the incident angle of the light beam and the intensity of the light reflected on the base of the prism 3 by the photodetector 8 integrated by the prism 3 and a holder 9. The optical constant is measured as the monitor of the process for forming various kinds of thin films and is fed back to film forming conditions. The non-destructive, easy and high-accurate measurement of the refractive index distribution of the thin film is executed in this way.
摘要附图：
