基本信息
摘要：PROBLEM TO BE SOLVED: To provide a method for measuring the density of precipitate particles capable of precisely measuring the particle density by easily measuring the surface density of precipitates and thickness of a sample while reducing a problem of counting loss in surface density measurement of precipitates.SOLUTION: The thickness of a sample is obtained by X-ray absorption difference method from the intensity ratio of a K-lay of a characteristic X-lay and an L-lay of a characteristic X-lay different from each other, which are emitted when irradiating with an electron ray a base material sample of a metal of copper, iron, cobalt or nickel. The areal density of the precipitate is measured from the characteristic X-ray image obtained by mapping characteristic X-rays to precipitates in the sample. From the thickness of these samples and the areal density of the precipitates, the particle density of the precipitates in the sample is calculated.SELECTED DRAWING: Figure 1 【課題】析出物の面密度測定の際の数え落としの問題を低減するとともに、析出物の面密度と試料の厚さとを簡易に計測して、その粒子密度を正確に測定する。【解決手段】銅、鉄、コバルト又はニッケルからなる金属の母材試料に電子線を照射して放出される異なる特性Ｘ線のＫ線と特性Ｘ線のＬ線の強度比からＸ線吸収差法により試料の厚さを求めるとともに、試料中の析出物に対する特性Ｘ線をマッピングした特性Ｘ線像から析出物の面密度を測定し、これら試料の厚さ、析出物の面密度から、試料中の析出物の粒子密度を算出する。【選択図】 図１
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