基本信息

• 发明名称： 【发明专利】 SYSTEM AND METHOD FOR DOUBLE-SIDED OPTICAL INSPECTING THIN-FILM DISC OR WAFER
• 申请日： 1970-08-21
• 申请号/专利号： JP2005001750
• 专利权人： MEEKS STEVEN W
• 申请人： CANDELA INSTR
• 分类号： G01B11/30
• 发明人/设计人： MEEKS STEVEN W
• 公开日/公告日： 1970.08.21
• 优先权号： G01B11/30
• 代理机构：
• 代理人：
• PCT申请号： 无
• PCT申请日期： 无
• PCT进入国家阶段日： 无
• 生物宝藏信息： 无
• 审查员： 无

摘要：

PROBLEM TO BE SOLVED: To provide a double-sided optical inspecting system for detecting and classifying particles, pits, or scratches on a thin-film disk or on a wafer, with a single scan on the surface.

SOLUTION: A pair of laser beams, projected so as to be orthogonal are used, such that one of the pair is used in the radial direction of the wafer or the thin-film disk, and the other is used in the circumferential direction. The lights, scattered from the radial direction and the circumferential direction are separated by using a dichroic mirror, together with a polarized light or different laser wavelength.

COPYRIGHT: (C)2005,JPO&NCIPI

摘要附图：