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摘要:The electron microscope has an electron emission device for emitting electrons (4) from a solid sample (1) through a tunnel effect. It also has an electron image generator to generate an electron image of the inside of the sample through the emitted electrons. An image recording device (6) records the electronic image. In another arrangement, The solid sample is held by a sample holder. The electron emission device has an electrode part (2) arranged such that it lies opposite respective regions of the sample surface from which electrons are to be emitted, with an intermediate space maintained between the emission device electrode part and the surface region. Alternatively the microscope has a film electrode (2) arranged to lie opposite the probe surface. A potential application device (8) applies a potential between the sample (1) and the thin film electrode. An electrooptical device (5) generates an electronic image through electrons emitted from the film electrode.

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