基本信息
摘要：The arrangement comprises a light source (4) with optical diodes (5,6,7) giving light successively at different wavelengths (12,13,14) to be picked up by detector (11). The probe arrangement (8) has sensors (2,3) which comprise glass plate (9) and polymer sheet film (10,25). Interference modulation at the thin film, or intensity modulation of reflection spectrum, may be used. The evaluation unit uses computer software to obtain the optical thickness of the thin film.
摘要附图：
