基本信息
摘要:The present invention provides a laminated structure for measuring reflected light intensity able to measure the thickness of a surface adsorbed film with high sensitivity by a simple optical technique. Provided are a laminated structure for measuring reflected light intensity at at least one wavelength that comprises a valve metal optical interference layer, and a method for measuring film thickness and/or mass and/or viscosity of a thin film targeted for measurement by radiating light onto the thin film targeted for measurement and measuring a change in reflected light intensity at at least one wavelength in a measurement medium in this laminated structure for measuring reflected light intensity.
摘要附图: