基本信息
摘要：PURPOSE: To make high-accuracy measurement by shifting the temperature of an element measuring the relative concentration so that the measuring element is operated in the range of the highest sensitivity. CONSTITUTION: A sensor assembly is provided with a heating/cooling element 7 arranged at the upper section with a thin film humidity sensor element 3 having a small heater resistor part 2 used as a dew point sensor and temperature sensors 6, 1. The sensor 6 measures the ambient temperature, and the sensor 1 measures the temperature of the element 3 respectively. The operating temperature of the element 3 is shifted to the optimum range. The peripheral face dew point is calculated from the measured result of the relative temperature of the element 3 and the measured temperature of the element 3. The ambient temperature measured by the sensor 6 is used as required. High- accuracy measurement can be made by this method even when reaction is fast and the relative humidity is low.
摘要附图：
