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摘要:PURPOSE:To enable detection of the entire area of a sample in a short time, by attaching ions generated by a corona discharge onto the surface of a sample comprising a insulated body to detect a pin hole or the like from the size of current leaking from the sample. CONSTITUTION:A sample 5 has one side of metal base material 6 covered with an insulation this film 7 and an open periphery of an insulated container 1 is put tight on the surface of the thin film 7 to form a closed space with both the parts. Now, when an output voltage of a DC power source 3 to be applied to a corona discharge electrode 2 is increased to generate a corona discharge, ions generated by the corona discharge diffuse within the close space formed with the container 1 and the thin film 7 with a potential gradient between the electrode 2 and the thin film 7, a part of the diffused ions attach onto the surface of the thin film 7 and leakage current due to the ions attached flows to a circuit of a current detector 8 through the thin film 7 and the base material 6. Thus, the presence of a pin hole or the like can be detected in the thin film 7 depending on a difference between readings of the detector 8 when the thin film 7 has no flaw and when it 7 has a pin hole or the like.

摘要附图: