基本信息
摘要：PURPOSE:To search for thermal conductivity of a thin film by sticking a film to be measured to a reference substance of known thermal conductivity, interposing a heating source between both for heating, heating the film to be measured, and measuring change of a resistance value of the heating source due to temperature change of the film to be measured generated by the heating. CONSTITUTION:A metallic film is formed on the surface of a film 2 to be measured, patterning is performed, and a thin line 11 of a heating source, current supply pads 25, voltage measuring pads 26 are formed thereon. A reference substance of known thermal conductivity is placed on the surface of the film 2 containing the thin line 11, and stuck thereto. Current is supplied from a constant power electric source 17 to the thin line 11 through the current supply probes 25, the thin line is heated, and the supply current is controlled by detecting in order the voltage applied on the thin line 11 with the voltage measuring probes 26. It is measured by a current/voltage measuring device 18, and the electric resistance value of the line 11 and temperature at that time are computed by a computer 19. Power supplied to the line 11 and the heating value per unit length/time is computed so as to obtain the thermal conductivity.
摘要附图：
